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Diffusion automated loading and unloading

This equipment automation is mainly used in battery factories to connect the automatic production line of low-voltage soft landing closed-tube diffusion furnace, including the automatic guiding function between the flower basket and the quartz boat, the robot loading and unloading the flower basket, and the docking signal processing.
  • Equipment function
  • Device parameters
  • Series products

Equipment function

This equipment automation is mainly used in battery factories to connect the automatic production line of low-voltage soft landing closed-tube diffusion furnace, including the automatic guiding function between the flower basket and the quartz boat, the robot loading and unloading the flower basket, and the docking signal processing.

Device parameters

Project Parameters Remarks
Wafer specifications 210*210mm Compatible with 180*180mm-220*220mm
Wafer thickness 140-200um  
Capacity ≥9000 tablets/hour (online) Use 1 drag 1 scheme
Guide basket specifications 100 piece guide basket Adopt full-step transmission mode
Loading and unloading flower baskets Upright mode (not lying down) Wet flower basket loading, dry flower basket loading
Fragmentation rate ≤0.03% Calculated for 1 month (1% includes maintenance, abnormal shutdown, fluid change)
Pitch 3.15 1200 or 1600 quartz boats
Equipment normal utilization rate ≥ 98% (Equipment normal utilization rate = (total time-maintenance time-failure time) / total time) 1 month
Other Use ceramic top teeth and suction cups

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